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Practical MEMS /

Kaajakari , Ville

Practical MEMS / [by] : Ville Kaajakari , Louisiana Tech University - Las Vegas , Nevada : Small Gear Publishing , ©2009 - xvi , 478 pages : illustrations ; 27 cm.

Includes bibliographical references (p. [447]-467) and index

ISBN: 9780982299104 (hbk. : alk. paper) 0982299109 (hbk. : alk. paper)

LCCN: 2009900294

Subjects--Topical Terms:
Microelectromechanical systems
Transducers
Accelerometers
Gyroscopes
Pressure transducers
Actuators
Mircofluidics
Integrated

LC Class. No.: TK7875 / .K33 2009

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Practical MEMS /