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Introduction to microfabrication /

Franssila , Sami

Introduction to microfabrication / [by] : Sami Franssila , Director of Microelectronics Centre , Helsinki University of Technology , Finland - West Sussex, England ; Hoboken, New Jersey : John Wiley , ©2004 - xvii , 401 pages : illustrations ; 26 cm.

Includes bibliographical references and index

ISBN: 0470851058 (cloth) 0470851066 (pbk.)

LCCN: 2004004940

Subjects--Topical Terms:
Microelectromechanical systems
Electronic apparatus and appliances
Microfabrication

LC Class. No.: TK7875 / .F73 2004

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Introduction to microfabrication /