Comprehensive microsystems . Volume 2 , Actuation Mechanism Physical Sensing Chemical and Biological Systems /
Comprehensive microsystems . Volume 2 , Actuation Mechanism Physical Sensing Chemical and Biological Systems /
editors-in-chief : Yogesh B. Gianchandani , University of Michigan , EECS Department , Michigan , USA , Osamu Tabata , Kyoto University , Department of Micro Engineering , Kyoto , Japan , Hans Zappe , University of Freiburg , Department of Microsystems Engineering , Freiburg , Germany
- Amsterdam ; Boston : Elsevier , ©2008
- 583 pages : illustrations (some color) ; 27 cm.
v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index.
9780444521941 (hbk.) 0444521941 (hbk.)
2007926969
GBA741112 bnb
013755921 Uk
Microelectromechanical systems
TK7875 / .C66 2008 Vol. 2
v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index.
9780444521941 (hbk.) 0444521941 (hbk.)
2007926969
GBA741112 bnb
013755921 Uk
Microelectromechanical systems
TK7875 / .C66 2008 Vol. 2