Comprehensive microsystems / Volume 3 , Optical Systems Industerial Applications Emerging Topics /
Comprehensive microsystems / Volume 3 , Optical Systems Industerial Applications Emerging Topics /
editors-in-chief : Yogesh B. Gianchandani , University of Michigan , EECS Department , Michigan , USA , Osamu Tabata , Kyoto University , Department of Micro Engineering , Kyoto , Japan , Hans Zappe , University of Freiburg , Department of Microsystems
- Amsterdam ; Boston : Elsevier, ©2008
- 737 pages : illustrations (some color) ; 27 cm.
v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index.
9780444521941 (hbk.) 0444521941 (hbk.)
2007926969
GBA741112 bnb
013755921 Uk
Microelectromechanical systems
TK7875 / .C66 2008 Vol. 3
v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index.
9780444521941 (hbk.) 0444521941 (hbk.)
2007926969
GBA741112 bnb
013755921 Uk
Microelectromechanical systems
TK7875 / .C66 2008 Vol. 3