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An Introduction to microelectromechanical systems engineering /

Maluf , Nadim

An Introduction to microelectromechanical systems engineering / Nadim Maluf , Kirt Williams - second edition - Boston : Artech House , ©2004 - xx , 283 pages : illustrations ; 26 cm. - Microelectromechanical systems series .

Includes bibliographical references and index

ISBN: 1580535909 (alk. paper) 9781580535908

LCCN: 2004050669

Subjects--Topical Terms:
Microelectromechanical systems

LC Class. No.: TK7875 / .M35 2004

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An Introduction to microelectromechanical systems engineering /