TY  - BOOK
AU  - Kaajakari ,Ville
TI  - Practical MEMS
SN  - 9780982299104 (hbk. : alk. paper)
AV  - TK7875 .K33 2009
PY  - 2009///
CY  - Las Vegas , Nevada
PB  - Small Gear Publishing
KW  - Microelectromechanical systems
KW  - LCSH
KW  - Transducers
KW  - Accelerometers
KW  - Gyroscopes
KW  - Pressure transducers
KW  - Actuators
KW  - Mircofluidics
KW  - Integrated
N1  - Includes bibliographical references (p. [447]-467) and index
ER  -