Franssila , Sami <br/><br/>
Introduction to microfabrication / 
[by] : Sami Franssila , Director of Microelectronics Centre , Helsinki University of Technology , Finland 
 - West Sussex, England ;  Hoboken, New Jersey :  John Wiley ,  ©2004 
 - xvii , 401 pages :  illustrations ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0470851058 (cloth) 0470851066 (pbk.) 
<br/><br/><label>LCCN: </label>2004004940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Electronic apparatus and appliances<br/>Microfabrication
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 2004