TY  - BOOK
AU  - Franssila ,Sami
TI  - Introduction to microfabrication
SN  - 0470851058 (cloth)
AV  - TK7875 .F73 2004
PY  - 2004///
CY  - West Sussex, England, Hoboken, New Jersey
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - LCSH
KW  - Electronic apparatus and appliances
KW  - Microfabrication
N1  - Includes bibliographical references and index
ER  -