TY  - BOOK
AU  - Gianchandani ,Yogesh B.
AU  - Tabata ,Osamu
AU  - Zappe ,Hans P.
TI  - Comprehensive microsystems . 
SN  - 9780444521941 (hbk.)
AV  - TK7875 .C66 2008 Vol. 2
PY  - 2008///
CY  - Amsterdam, Boston
PB  - Elsevier
KW  - Microelectromechanical systems
KW  - LCSH
N1  - v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index
ER  -