Comprehensive microsystems .   Volume 1 ,   Materials Fabrication and Packaging Electronics and Systems Design /  
editors-in-chief : Yogesh B. Gianchandani , University of Michigan , EECS Department , Michigan , USA , Osamu Tabata , Kyoto University , Department of Micro Engineering , Kyoto , Japan , Hans Zappe , University of Freiburg , Department of Microsystems 
 - Amsterdam ;  Boston :  Elsevier ,  ©2008 
 - 583 pages :  illustrations (some color) ;  27 cm. 
<br/><br/>v. 1. Materials. Fabrication and packaging. Electronics and systems design -- v. 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- v. 3. Optical systems. Industrial applications. Emerging topics. Index. 
<br/><br/><label>ISBN: </label>9780444521941 (hbk.) 0444521941 (hbk.) 
<br/><br/><label>LCCN: </label>2007926969 
<br/><br/><label>Nat. Bib. No.: </label>GBA741112  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>013755921  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>LC Class. No.: </label>TK7875  / .C66 2008 Vol. 1 
<br/><br/><label>Dewey Class. No.: </label>621.381