TY  - BOOK
AU  - Santos ,Héctor J.de los
TI  - Introduction to microelectromechanical microwave systems
T2  - Microelectromechanical systems series
SN  - 1580538711
AV  - TK7876 .S28 2004
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microwave devices
KW  - LCSH
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -