Maluf , Nadim <br/><br/>
An Introduction to microelectromechanical systems engineering / 
Nadim Maluf , Kirt Williams 
 - second edition 
 - Boston :  Artech House ,  ©2004 
 - xx , 283 pages :  illustrations ;  26 cm. 
 - Microelectromechanical systems series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>1580535909 (alk. paper) 9781580535908 
<br/><br/><label>LCCN: </label>2004050669 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>LC Class. No.: </label>TK7875  / .M35 2004