TY  - BOOK
AU  - Maluf ,Nadim
AU  - Williams ,Kirt
TI  - An Introduction to microelectromechanical systems engineering
T2  - Microelectromechanical systems series
SN  - 1580535909 (alk. paper)
AV  - TK7875 .M35 2004
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - LCSH
N1  - Includes bibliographical references and index
ER  -