TY  - BOOK
AU  - Varadan ,V.K.
AU  - Vinoy,K.J.
AU  - Gopalakrishnan,S.
TI  - Smart Material Systems and MEMS: Design and Development Methodologies 
SN  - 0470093617 (cloth : alk. paper)
AV  - TK7875 V377 2006
U1  - 621.381 22
PY  - 2006///
CY  - Chichester, England ; , Hoboken, NJ : 
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - LCSH
KW  - Smart materials
N1  - Includes bibliographical references and index
ER  -