TY  - BOOK
AU  - Ohring,Milton
TI  - Materials Science of Thin Films: Deposition and Structure 
SN  - 0125249756 (alk. paper)
AV  - TA418.9.T45 O47 2002
U1  - 621.3815/2 22
PY  - 2002///
CY  - San Diego, CA
PB  - Academic Press
KW  - Thin films
KW  - LCSH
KW  - science
N1  - Includes bibliographical references and index
ER  -