| 000 | 01091cam a22003377a 4500 | ||
|---|---|---|---|
| 003 | EG-NbEJU | ||
| 005 | 20240516114034.0 | ||
| 008 | 240425t2009 nvua grb 001 0 eng | ||
| 010 | _a2009900294 | ||
| 020 | _a9780982299104 (hbk. : alk. paper) | ||
| 020 | _a0982299109 (hbk. : alk. paper) | ||
| 040 |
_aEG-NbEJU _cEG-NbEJU _beng _dEG-NbEJU |
||
| 041 | _aeng | ||
| 050 | 0 | 0 |
_aTK7875 _b.K33 2009 |
| 100 | 1 | _aKaajakari , Ville | |
| 245 | 1 | 0 |
_aPractical MEMS / _c[by] : Ville Kaajakari , Louisiana Tech University |
| 260 |
_aLas Vegas , Nevada : _bSmall Gear Publishing , _c©2009 |
||
| 300 |
_axvi , 478 pages : _billustrations ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references (p. [447]-467) and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _2LCSH |
|
| 650 | 0 |
_aTransducers _2LCSH |
|
| 650 | 0 |
_aAccelerometers _2LCSH |
|
| 650 | 0 |
_aGyroscopes _2LCSH |
|
| 650 | 0 |
_aPressure transducers _2LCSH |
|
| 650 | 0 |
_aActuators _2LCSH |
|
| 650 | 0 |
_aMircofluidics _2LCSH |
|
| 650 | 0 |
_aIntegrated _2LCSH |
|
| 901 | _asara sorur | ||
| 902 | _aENG_03_(1202) | ||
| 942 |
_2lcc _cBK |
||
| 999 |
_c3502 _d3502 |
||