| 000 | 01019cam a22002894a 4500 | ||
|---|---|---|---|
| 003 | EG-NbEJU | ||
| 005 | 20240516114034.0 | ||
| 008 | 240426s2004 enka grb 001 0 eng | ||
| 010 | _a2004004940 | ||
| 020 | _a0470851058 (cloth) | ||
| 020 | _a0470851066 (pbk.) | ||
| 040 |
_aEG-NbEJU _cEG-NbEJU _dEG-NbEJU _beng |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.F73 2004 |
| 100 | 1 | _aFranssila , Sami | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication / _c[by] : Sami Franssila , Director of Microelectronics Centre , Helsinki University of Technology , Finland |
| 260 |
_aWest Sussex, England ; _aHoboken, New Jersey : _bJohn Wiley , _c©2004 |
||
| 300 |
_axvii , 401 pages : _billustrations ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _2LCSH |
|
| 650 | 0 |
_aElectronic apparatus and appliances _2LCSH |
|
| 650 | 0 |
_aMicrofabrication _2LCSH |
|
| 901 | _asara sorur | ||
| 902 |
_aENG_03_(1203) _aENG_03_(1264) |
||
| 942 |
_2lcc _cBK |
||
| 999 |
_c3503 _d3503 |
||