000 00952cam a22003014a 4500
003 EG-NbEJU
005 20250611024305.0
008 040825t2004 mau grb 001 0 eng
010 _a2004052959
020 _a1580538711
040 _aEG-NbEJU
_cEG-NbEJU
_dEG-NbEJU
_beng
041 _aeng
042 _apcc
050 0 0 _aTK7876
_b.S28 2004
100 1 _aSantos , Héctor J. de los.
245 1 0 _aIntroduction to microelectromechanical microwave systems /
_c[by] : Héctor J. de los Santos
250 _asecond edition
260 _aBoston :
_bArtech House ,
_c©2004
300 _axiii , 221 pages :
_billustrations ;
_c24 cm.
490 0 0 _aMicroelectromechanical systems series
504 _aIncludes bibliographical references and index
650 0 _aMicrowave devices
_2LCSH
650 0 _aMicroelectromechanical systems
_2LCSH
901 _asara sorur
902 _aENG_03_(1349)
942 _2lcc
_cBK
_n0
999 _c3833
_d3833