| 000 | 00985cam a22003014a 4500 | ||
|---|---|---|---|
| 003 | EG-NbEJU | ||
| 005 | 20241208212129.0 | ||
| 008 | 240508t2004 maua grb 001 0 eng | ||
| 010 | _a2004050669 | ||
| 020 | _a1580535909 (alk. paper) | ||
| 020 | _a9781580535908 | ||
| 040 |
_aEG-NbEJU _cEG-NbEJU _dEG-NbEJU _beng |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.M35 2004 |
| 100 | 1 | _aMaluf , Nadim | |
| 245 | 1 | 3 |
_aAn Introduction to microelectromechanical systems engineering / _cNadim Maluf , Kirt Williams |
| 250 | _asecond edition | ||
| 260 |
_aBoston : _bArtech House , _c©2004 |
||
| 300 |
_axx , 283 pages : _billustrations ; _c26 cm. |
||
| 490 | 0 | 0 | _aMicroelectromechanical systems series |
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aMicroelectromechanical systems _2LCSH |
|
| 700 | 1 |
_aWilliams , Kirt , _eco-author |
|
| 901 | _asara sorur | ||
| 902 |
_aENG_03_(1366) _aENG_03_(1367) _aENG_03_ (1817) |
||
| 942 |
_2lcc _cBK _n0 |
||
| 999 |
_c3861 _d3861 |
||